WebMERIE, Magnetically Enhanced Reactive Ion Etching, is where a magnetic field is applied in a capacitively coupled plasma etcher. Applied magnetic field enhances the etch rate … Webmagnetically enhanced reactive ion etching (MERIE) reactor with a CHF3/CF4 gas chemistry. We use a statistical 24-1 experimental design plus one center point to characterize the relationships between the process factors and etch responses. The …
Plasma Enhanced Chemical Vapor Deposition (PECVD) (2D …
WebThe present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion … Web10 feb. 2024 · HDPCVD는 High Density Plasma CVD로 기존 PECVD의 단점을 극복하기 위한 솔루션으로 개발된 장비입니다. PECVD는 저온공정임에도 불구하고 Throughput이 높다는 장점이 있지만 소자 dimension이 점점 작아지면서 Aspect ration가 높은 좁고 깊은 depth profile을 구현하기에는 step coverage가 저조하다는 단점을 가집니다. 그래서 … log in qbo
The Development of Silicon Nanowire as Sensing Material and Its ...
WebUS20240249293A1 US16/261,516 US202416261516A US2024249293A1 US 20240249293 A1 US20240249293 A1 US 20240249293A1 US 202416261516 A US202416261516 A … WebU.S. Patent Application 20240102284 for Magnetically Enhanced Low Temperature-High Density Plasma-Chemical ... U.S. patent application number 17/124749 was filed with … Web11 apr. 2024 · Shape memory nanocomposites are excellent smart materials which can switch between a variable temporary shape and their original shape upon exposure to external stimuli such as heat, light, electricity, magnetic fields, moisture, chemicals, pH, etc. Numerous nanofillers have been introduced in shape memory polymers such as carbon … log in qld transport